ICPIG 2003 - Contributed Papers


Physical aspects of plasma chemistry, plasma processing of surfaces and thin film technology

We have 32 Contributed Papers under this topic in the database

AuthorsTitleAbstract
N. B. Anikin, S. M. Starikovskaia, A. Yu. Starikovskii Slow Oxidation of n-Hexane in Stoichiometric Mixtures with Air and Oxygen under Nanosecond Discharge Condition Show
Th. Arnold, S. Grabovski, A. Schindler, H.-E. Wagner Spatially Resolved Spectroscopic Investigations and Numerical Simulation of the Chemical Kinetics in Reactive Microwave Driven Plasma Jets Show
C. Biloiu, I. A. Biloiu, A. Ohta, Y. Sakai, Y. Suda Amorphous fluorocarbon polymer (a-C:F) films prepared in perfluorooctane (C8F18) vapor RF plasmas Show
S. A. Bozhenkov, S. M. Starikovskaia, A. Yu. Starikovskii Development of a Nanosecond Discharge at High Temperatures Show
M. Geigl, H.-E. Wagner, V. Krutilina, J. Meichsner Stable and Transient Neutral Species in RF CF4 Plasmas Show
S. H. Haji Hosseini, N. A. Vahabzadeh, A. H. Sari, M. R. Hantehzadeh, M. Ghoranneviss Investigation of Zn Diffusion in InGaAsP/InP Heterostructure Using Secondary Ion Mass Spectrometry Show
T. Ishijima, H. Matoba, H. Sugai Surface Wave Excited Plasma for Low-Temperature Silicon Oxidation and Oxygen Radical Control Show
J. Kim, M. Katsurai Optimum Plasma Generation for High-Quality Diamond Film Depositions in Surface Wave Plasma CVD Apparatus Show
K. V. Korytchenko, M. A. Krasnogolovets, A. N. Dovbnya, Yu. Ya. Volkolupov Variants of Applying Plasma-Wave Systems in Air-Jet Engines and Chemical Lasers Show
S. Kurita, M. Yamashita, K. Naito, M. Nagatsu Growth of Catalytic Metal Composed Amorphous Carbon Films and Carbon Nanotube Using Large-Area Surface-Wave Plasma Show
K. Kutasi, Z. Donko, L. Nemes, M. Mohai Optical Emission Spectroscopy of a Nitrogen Glow Discharge with Graphite Electrodes Show
E. S. Lee, H. I. Park, H. K. Baik Adhesion Enhancement of NCHF Rubber with the Polyurethane Coating Layer Using Atmospheric Air Plasma Show
K. Li, O. Gabriel, J. Meichsner Temporal Behaviour of CF2 Concentration in CF4/H2 Plasma of Pulsed RF Capacitive Discharge Studied by IR Diode Laser Spectroscopy Show
A. I. Lyapin Modelling of Processes Accompanying a Treatment of Surfaces in Gas Discharge: Influence of Discharge Regime on Working Gas Composition Show
J. Maeda, T. Nakagawa, M. Nagatsu Microwave Plasma CVD Reactor for Diamond Film Synthesis with Double Microwave Launchers System Show
A. McCarter, R. N. Faulkner, A. R. Ellingboe, M. M. Turner E to H Transition in Inductively Coupled Plasmas Show
T. Mikoviny, S. Matejcik, B. Gulejova, C. Gaman, S. Eden, N. J. Mason, J. D. Skalny Inhibition Effect of N2O on Generation Ozone by Negative Corona Discharge in Oxygen and Air Show
T. Misu, M. Goto, T. Arai Reactive Ion Etching of Diamond Films Using O2/CF4 Plasma with Narrow Electrode Gap Show
G. Musa, I. Mustata, M. Blideran, V. Ciupina, R. Vladoiu, G. Prodan, E. Vasile, H. Ehrich Carbon Thin Film Condensation from Thermionic Vacuum Arc Carbon Plasma Show
S. Mändl, D. Manova, H. Neumann, B. Rauschenbach Textured Film Deposition Using Metal Ions from a Plasma Show
T. Ohta, T. Ishida, M. Hori, T. Goto, M. Ito, S. Kawakami, N. Ishii The Behaviour of Si Atoms in Capacitively Coupled VHF Plasma Employing SiF4 Show
J. Pawlat, N. Hayashi, C. Yamabe, A. Mizuno, I. Pollo Tube Type Foaming Reactor Oxidants' Generation and Application Possibilities Show
M. V. V. S. Rao, S. P. Sharma, B. A. Cruden, A. A. Bolshakov, M. Meyyappan Study of Transition in Operating Region in Low-Pressure Inductively Coupled Oxygen Plasmas Show
M. El Shaer, M. Wuttmann Enhancement of Chlorides Removal from Copper Artifacts by the Effect of RF Hydrogen Plasma Show
S. P. Sharma, B. A. Cruden, M. V. V. S. Rao, A. A. Bolshakov Analysis of Emission Data from O2 Plasmas Used for Microbe Sterilization Show
S. N. Srivastava, K. P. Rohr Segregation of Neutrals and Ions in Laser Ablated Plasmas from Binary Targets Show
S. N. Srivastava, K. P. Rohr Energy and Emission Distributions of Ions in Laser Ablated Plasmas from Binary Targets Show
H. Steffen, M. Quaas, H. Wulff, R. Hippler On the Role of Negative Oxygen Ions during ITO Film Formation Show
O. Stepanovic, J. Berndt, J. Winter Synergistic Effects in Deposition and Etching of a-C:H-Films Show
P. Svarnas, N. Spyrou, B. Held Estimation of the Surface Free Energy of Polystyrene Thin Films Treated under a DC Point-to-Plane at Low-Pressure Discharge in Nitrogen Show
K. Teranishi, S. Suzuki, H. Itoh High Efficiency Ozone Production by a Compact Ozoniser Using Piezoelectric Transformer Show
P. Vasina, L. De Poucques, O. Leroy, D. Pagnon, L. Teule-Gay, C. Boisse-Laporte, M. Touzeau Optical Emission and Absorption Spectroscopy Measurements in a Microwave Assisted IPVD Reactor Show


© 2002-2003 ICPIG 2003, Greifswald, Jürgen Meichsner, Detlef Loffhagen & Hans Erich Wagner
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Script written by Thomas Meyer, May. 20th, 2003